Technical Features
- Function: High-fidelity replication of large-area square glass substrates
- Applications: Advanced displays, diffractive optical elements (optical waveguides / gratings / microlens arrays), and other micro-nano structures
Performance Parameters
- Roll-to-flat imprinting with flexible transparent mold; automatic demolding: speed and force adjustable via software, one-click automatic renewal of sub-molds
- Substrate size: 500*500 mm (square glass) or smaller
- Residual layer: <20 nm @ structural range 50 nm–2 μm; uniformity better than ±5% over 500 mm range
- Imprinting platform: multi-channel micro-porous adsorption tray (vacuum zones independently configurable), tray temperature control (up to 100 ℃, uniformity better than ±4%; active cooling system optional)
- Linear light source: 365 nm LED, optical power density 2000 mW/cm?, optical power uniformity better than 90%
- Alignment function (optional): X-Y-θ-Z stage + high-precision CCD optical visual recognition
- Coating mode: patterned coating (compatible with sub-mold fabrication)
- Cleanliness class: internal environment Class 10 (external environment requirement Class 100); ambient temperature 15–25 ℃, humidity ≤70%
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